Warpage measurement using projection speckle correlation method and microscopic interferometry

10.1117/12.839252

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Bibliographic Details
Main Authors:	Sun, W., He, X.Y., Quan, C.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Continuous wavelet transform (CWT) Newton's ring interferometry Projection speckle correlation method Savitzky-golay differential operator Warpage
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/74012
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-74012
record_format	dspace
spelling	sg-nus-scholar.10635-740122015-01-06T06:57:40Z Warpage measurement using projection speckle correlation method and microscopic interferometry Sun, W. He, X.Y. Quan, C. MECHANICAL ENGINEERING Continuous wavelet transform (CWT) Newton's ring interferometry Projection speckle correlation method Savitzky-golay differential operator Warpage 10.1117/12.839252 Proceedings of SPIE - The International Society for Optical Engineering 7375 - PSISD 2014-06-19T05:42:03Z 2014-06-19T05:42:03Z 2009 Conference Paper Sun, W.,He, X.Y.,Quan, C. (2009). Warpage measurement using projection speckle correlation method and microscopic interferometry. Proceedings of SPIE - The International Society for Optical Engineering 7375 : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1117/12.839252" target="_blank">https://doi.org/10.1117/12.839252</a> 0277786X http://scholarbank.nus.edu.sg/handle/10635/74012 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Continuous wavelet transform (CWT) Newton's ring interferometry Projection speckle correlation method Savitzky-golay differential operator Warpage
spellingShingle	Continuous wavelet transform (CWT) Newton's ring interferometry Projection speckle correlation method Savitzky-golay differential operator Warpage Sun, W. He, X.Y. Quan, C. Warpage measurement using projection speckle correlation method and microscopic interferometry
description	10.1117/12.839252
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Sun, W. He, X.Y. Quan, C.
format	Conference or Workshop Item
author	Sun, W. He, X.Y. Quan, C.
author_sort	Sun, W.
title	Warpage measurement using projection speckle correlation method and microscopic interferometry
title_short	Warpage measurement using projection speckle correlation method and microscopic interferometry
title_full	Warpage measurement using projection speckle correlation method and microscopic interferometry
title_fullStr	Warpage measurement using projection speckle correlation method and microscopic interferometry
title_full_unstemmed	Warpage measurement using projection speckle correlation method and microscopic interferometry
title_sort	warpage measurement using projection speckle correlation method and microscopic interferometry
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/74012
_version_	1681087852246466560

Warpage measurement using projection speckle correlation method and microscopic interferometry

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