Alternative methods to extract the hardness and elastic modulus of thin films from nanoindentation load-displacement data

Alternative methods to extract the hardness and elastic modulus of thin films from nanoindentation load-displacement data

10.1142/S1758825110000445

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Bibliographic Details
Main Authors: Kumar, A., Zeng, K.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
elastic modulus
Hardness
nanoindentation
substrate effects
thin films
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59402
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Institution: National University of Singapore
Description
Summary:10.1142/S1758825110000445

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