An open-loop nano-positioning micromechanical digital-to-analog converter for grating light modulation

• Main Authors: Zhou, G., Logeeswaran, V.J., Chau, F.S.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Diffraction grating; Grating light modulator; Microelectromechanical systems (MEMS); Optical microelectromechanical systems (MEMS)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/59503
• Institution: National University of Singapore

10.1109/LPT.2005.845717