An open-loop nano-positioning micromechanical digital-to-analog converter for grating light modulation
10.1109/LPT.2005.845717
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Main Authors: | Zhou, G., Logeeswaran, V.J., Chau, F.S. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/59503 |
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Institution: | National University of Singapore |
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