An optical shadowgraph microscope for a semiconductor wafer bump height measurement
10.1063/1.1879312
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2014
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sg-nus-scholar.10635-595042023-10-25T23:31:32Z An optical shadowgraph microscope for a semiconductor wafer bump height measurement Wang, S. Quan, C. Tay, C.J. MECHANICAL ENGINEERING 10.1063/1.1879312 Review of Scientific Instruments 76 4 - RSINA 2014-06-17T06:12:13Z 2014-06-17T06:12:13Z 2005-04 Article Wang, S., Quan, C., Tay, C.J. (2005-04). An optical shadowgraph microscope for a semiconductor wafer bump height measurement. Review of Scientific Instruments 76 (4) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1879312 00346748 http://scholarbank.nus.edu.sg/handle/10635/59504 000228362200051 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1063/1.1879312 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Wang, S. Quan, C. Tay, C.J. |
| format |
Article |
| author |
Wang, S. Quan, C. Tay, C.J. |
| spellingShingle |
Wang, S. Quan, C. Tay, C.J. An optical shadowgraph microscope for a semiconductor wafer bump height measurement |
| author_sort |
Wang, S. |
| title |
An optical shadowgraph microscope for a semiconductor wafer bump height measurement |
| title_short |
An optical shadowgraph microscope for a semiconductor wafer bump height measurement |
| title_full |
An optical shadowgraph microscope for a semiconductor wafer bump height measurement |
| title_fullStr |
An optical shadowgraph microscope for a semiconductor wafer bump height measurement |
| title_full_unstemmed |
An optical shadowgraph microscope for a semiconductor wafer bump height measurement |
| title_sort |
optical shadowgraph microscope for a semiconductor wafer bump height measurement |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/59504 |
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1781781643422334976 |