An optical shadowgraph microscope for a semiconductor wafer bump height measurement

10.1063/1.1879312

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Bibliographic Details
Main Authors: Wang, S., Quan, C., Tay, C.J.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59504
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Institution: National University of Singapore
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