Determination of the material properties of multilayered thin films using the elastic wave propagation approach
10.1088/0960-1317/12/6/301
Saved in:
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/59887 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-59887 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-598872023-10-29T22:56:19Z Determination of the material properties of multilayered thin films using the elastic wave propagation approach Xu, Y.G. Liu, G.R. MECHANICAL ENGINEERING 10.1088/0960-1317/12/6/301 Journal of Micromechanics and Microengineering 12 6 723-729 JMMIE 2014-06-17T06:16:44Z 2014-06-17T06:16:44Z 2002-11 Article Xu, Y.G., Liu, G.R. (2002-11). Determination of the material properties of multilayered thin films using the elastic wave propagation approach. Journal of Micromechanics and Microengineering 12 (6) : 723-729. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/12/6/301 09601317 http://scholarbank.nus.edu.sg/handle/10635/59887 000179510600001 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1088/0960-1317/12/6/301 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Xu, Y.G. Liu, G.R. |
| format |
Article |
| author |
Xu, Y.G. Liu, G.R. |
| spellingShingle |
Xu, Y.G. Liu, G.R. Determination of the material properties of multilayered thin films using the elastic wave propagation approach |
| author_sort |
Xu, Y.G. |
| title |
Determination of the material properties of multilayered thin films using the elastic wave propagation approach |
| title_short |
Determination of the material properties of multilayered thin films using the elastic wave propagation approach |
| title_full |
Determination of the material properties of multilayered thin films using the elastic wave propagation approach |
| title_fullStr |
Determination of the material properties of multilayered thin films using the elastic wave propagation approach |
| title_full_unstemmed |
Determination of the material properties of multilayered thin films using the elastic wave propagation approach |
| title_sort |
determination of the material properties of multilayered thin films using the elastic wave propagation approach |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/59887 |
| _version_ |
1781781722637008896 |