Determination of the material properties of multilayered thin films using the elastic wave propagation approach

10.1088/0960-1317/12/6/301

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Bibliographic Details
Main Authors: Xu, Y.G., Liu, G.R.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59887
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Institution: National University of Singapore
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