Determination of the material properties of multilayered thin films using the elastic wave propagation approach
10.1088/0960-1317/12/6/301
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Main Authors: | Xu, Y.G., Liu, G.R. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/59887 |
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Institution: | National University of Singapore |
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