Dynamic characterization of MEMS structures by ultrasonic wave excitation

10.1088/0960-1317/17/12/006

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Bibliographic Details
Main Authors:	Kang, X., Tay, C.J., Quan, C., He, X.Y.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60005
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Institution:	National University of Singapore

Description
Summary:	10.1088/0960-1317/17/12/006

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