Dynamic characterization of MEMS structures by ultrasonic wave excitation
10.1088/0960-1317/17/12/006
Saved in:
Main Authors: | Kang, X., Tay, C.J., Quan, C., He, X.Y. |
---|---|
Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/60005 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Non-contact evaluation of the resonant frequency of a microstructure using ultrasonic wave
by: Kang, X., et al.
Published: (2014) -
Dynamic analysis of cylindrical ultrasonic motor under external excitation
by: Wang, X., et al.
Published: (2014) -
Comparison of two new T-shape standing-wave ultrasonic motors
by: Hou, X.Y., et al.
Published: (2014) -
Contact mechanics of traveling wave ultrasonic motors
by: Shen, S., et al.
Published: (2014) -
Development and numerical characterization of a new standing wave ultrasonic motor operating in the 30-40 kHz frequency range
by: Hou, X., et al.
Published: (2014)