Dynamic characterization of MEMS structures by ultrasonic wave excitation
10.1088/0960-1317/17/12/006
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sg-nus-scholar.10635-600052023-10-25T20:41:20Z Dynamic characterization of MEMS structures by ultrasonic wave excitation Kang, X. Tay, C.J. Quan, C. He, X.Y. MECHANICAL ENGINEERING 10.1088/0960-1317/17/12/006 Journal of Micromechanics and Microengineering 17 12 2426-2431 JMMIE 2014-06-17T06:18:07Z 2014-06-17T06:18:07Z 2007-12-01 Article Kang, X., Tay, C.J., Quan, C., He, X.Y. (2007-12-01). Dynamic characterization of MEMS structures by ultrasonic wave excitation. Journal of Micromechanics and Microengineering 17 (12) : 2426-2431. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/17/12/006 09601317 http://scholarbank.nus.edu.sg/handle/10635/60005 000251767100006 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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| description |
10.1088/0960-1317/17/12/006 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Kang, X. Tay, C.J. Quan, C. He, X.Y. |
| format |
Article |
| author |
Kang, X. Tay, C.J. Quan, C. He, X.Y. |
| spellingShingle |
Kang, X. Tay, C.J. Quan, C. He, X.Y. Dynamic characterization of MEMS structures by ultrasonic wave excitation |
| author_sort |
Kang, X. |
| title |
Dynamic characterization of MEMS structures by ultrasonic wave excitation |
| title_short |
Dynamic characterization of MEMS structures by ultrasonic wave excitation |
| title_full |
Dynamic characterization of MEMS structures by ultrasonic wave excitation |
| title_fullStr |
Dynamic characterization of MEMS structures by ultrasonic wave excitation |
| title_full_unstemmed |
Dynamic characterization of MEMS structures by ultrasonic wave excitation |
| title_sort |
dynamic characterization of mems structures by ultrasonic wave excitation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60005 |
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1781781747604652032 |