Effect of crystalline orientation of a diamond tool on the machined surface in ductile mode cutting of silicon

Effect of crystalline orientation of a diamond tool on the machined surface in ductile mode cutting of silicon

10.1243/09544054JEM1249

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Bibliographic Details
Main Authors: Li, X.P., Cai, M.B., Neo, W.C.L., Sean, K.H.W.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Crystalline behaviour
Diamond cut
Nanoscale ductile cutting
Silicon
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60037
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Institution: National University of Singapore
Description
Summary:10.1243/09544054JEM1249

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