Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives

Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives

10.1007/s00542-006-0246-4

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Bibliographic Details
Main Authors: Chen, B., Miao, J., Tay, F.E.H.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60272
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Institution: National University of Singapore
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Summary:10.1007/s00542-006-0246-4

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