Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives

10.1007/s00542-006-0246-4

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Main Authors:	Chen, B., Miao, J., Tay, F.E.H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60272
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60272
record_format	dspace
spelling	sg-nus-scholar.10635-602722023-10-25T23:29:22Z Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives Chen, B. Miao, J. Tay, F.E.H. MECHANICAL ENGINEERING 10.1007/s00542-006-0246-4 Microsystem Technologies 13 1 11-19 2014-06-17T06:21:14Z 2014-06-17T06:21:14Z 2007-01 Article Chen, B., Miao, J., Tay, F.E.H. (2007-01). Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives. Microsystem Technologies 13 (1) : 11-19. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-006-0246-4 09467076 http://scholarbank.nus.edu.sg/handle/10635/60272 000241521700002 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00542-006-0246-4
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Chen, B. Miao, J. Tay, F.E.H.
format	Article
author	Chen, B. Miao, J. Tay, F.E.H.
spellingShingle	Chen, B. Miao, J. Tay, F.E.H. Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
author_sort	Chen, B.
title	Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
title_short	Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
title_full	Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
title_fullStr	Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
title_full_unstemmed	Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
title_sort	fabrication and characterization of drie-micromachined electrostatic microactuators for hard disk drives
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60272
_version_	1781781803149819904

Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives

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