Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
10.1007/s00542-006-0246-4
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Main Authors: | Chen, B., Miao, J., Tay, F.E.H. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/60272 |
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Institution: | National University of Singapore |
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