Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining
10.1088/0960-1317/23/9/095023
Saved in:
Main Authors: | , , |
---|---|
Other Authors: | |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/60290 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-60290 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-602902023-10-25T20:24:32Z Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining Oh, S.R. Yao, K. Tay, F.E.H. MECHANICAL ENGINEERING 10.1088/0960-1317/23/9/095023 Journal of Micromechanics and Microengineering 23 9 - JMMIE 2014-06-17T06:21:28Z 2014-06-17T06:21:28Z 2013-09 Article Oh, S.R., Yao, K., Tay, F.E.H. (2013-09). Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining. Journal of Micromechanics and Microengineering 23 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/23/9/095023 09601317 http://scholarbank.nus.edu.sg/handle/10635/60290 000323814100024 Scopus |
institution |
National University of Singapore |
building |
NUS Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NUS Library |
collection |
ScholarBank@NUS |
description |
10.1088/0960-1317/23/9/095023 |
author2 |
MECHANICAL ENGINEERING |
author_facet |
MECHANICAL ENGINEERING Oh, S.R. Yao, K. Tay, F.E.H. |
format |
Article |
author |
Oh, S.R. Yao, K. Tay, F.E.H. |
spellingShingle |
Oh, S.R. Yao, K. Tay, F.E.H. Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
author_sort |
Oh, S.R. |
title |
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
title_short |
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
title_full |
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
title_fullStr |
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
title_full_unstemmed |
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
title_sort |
fabrication of piezoelectric p(vdf-trfe) microcantilevers by wafer-level surface micromachining |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/60290 |
_version_ |
1781781806789427200 |