Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining

10.1088/0960-1317/23/9/095023

Saved in:
Bibliographic Details
Main Authors: Oh, S.R., Yao, K., Tay, F.E.H.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60290
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-60290
record_format dspace
spelling sg-nus-scholar.10635-602902023-10-25T20:24:32Z Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining Oh, S.R. Yao, K. Tay, F.E.H. MECHANICAL ENGINEERING 10.1088/0960-1317/23/9/095023 Journal of Micromechanics and Microengineering 23 9 - JMMIE 2014-06-17T06:21:28Z 2014-06-17T06:21:28Z 2013-09 Article Oh, S.R., Yao, K., Tay, F.E.H. (2013-09). Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining. Journal of Micromechanics and Microengineering 23 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/23/9/095023 09601317 http://scholarbank.nus.edu.sg/handle/10635/60290 000323814100024 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1088/0960-1317/23/9/095023
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Oh, S.R.
Yao, K.
Tay, F.E.H.
format Article
author Oh, S.R.
Yao, K.
Tay, F.E.H.
spellingShingle Oh, S.R.
Yao, K.
Tay, F.E.H.
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining
author_sort Oh, S.R.
title Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining
title_short Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining
title_full Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining
title_fullStr Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining
title_full_unstemmed Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining
title_sort fabrication of piezoelectric p(vdf-trfe) microcantilevers by wafer-level surface micromachining
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/60290
_version_ 1781781806789427200