Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining
10.1088/0960-1317/23/9/095023
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sg-nus-scholar.10635-602902023-10-25T20:24:32Z Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining Oh, S.R. Yao, K. Tay, F.E.H. MECHANICAL ENGINEERING 10.1088/0960-1317/23/9/095023 Journal of Micromechanics and Microengineering 23 9 - JMMIE 2014-06-17T06:21:28Z 2014-06-17T06:21:28Z 2013-09 Article Oh, S.R., Yao, K., Tay, F.E.H. (2013-09). Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining. Journal of Micromechanics and Microengineering 23 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/23/9/095023 09601317 http://scholarbank.nus.edu.sg/handle/10635/60290 000323814100024 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1088/0960-1317/23/9/095023 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Oh, S.R. Yao, K. Tay, F.E.H. |
| format |
Article |
| author |
Oh, S.R. Yao, K. Tay, F.E.H. |
| spellingShingle |
Oh, S.R. Yao, K. Tay, F.E.H. Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
| author_sort |
Oh, S.R. |
| title |
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
| title_short |
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
| title_full |
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
| title_fullStr |
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
| title_full_unstemmed |
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining |
| title_sort |
fabrication of piezoelectric p(vdf-trfe) microcantilevers by wafer-level surface micromachining |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60290 |
| _version_ |
1781781806789427200 |