Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining

10.1088/0960-1317/23/9/095023

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Bibliographic Details
Main Authors:	Oh, S.R., Yao, K., Tay, F.E.H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60290
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Institution:	National University of Singapore

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