Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems

Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems

10.1063/1.2432948

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Bibliographic Details
Main Authors: Dai, L., Tan, V.B.C., Yang, S.-W., Wu, P., Chen, X.-T.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60630
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/60630

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