Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems

Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems

10.1063/1.2432948

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Main Authors: Dai, L., Tan, V.B.C., Yang, S.-W., Wu, P., Chen, X.-T.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60630
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-606302023-10-25T21:50:13Z Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems Dai, L. Tan, V.B.C. Yang, S.-W. Wu, P. Chen, X.-T. MECHANICAL ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE 10.1063/1.2432948 Applied Physics Letters 90 3 - APPLA 2014-06-17T06:25:30Z 2014-06-17T06:25:30Z 2007 Article Dai, L., Tan, V.B.C., Yang, S.-W., Wu, P., Chen, X.-T. (2007). Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems. Applied Physics Letters 90 (3) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2432948 00036951 http://scholarbank.nus.edu.sg/handle/10635/60630 000243582400065 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.2432948
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Dai, L.
Tan, V.B.C.
Yang, S.-W.
Wu, P.
Chen, X.-T.
format Article
author Dai, L.
Tan, V.B.C.
Yang, S.-W.
Wu, P.
Chen, X.-T.
spellingShingle Dai, L.
Tan, V.B.C.
Yang, S.-W.
Wu, P.
Chen, X.-T.
Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems
author_sort Dai, L.
title Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems
title_short Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems
title_full Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems
title_fullStr Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems
title_full_unstemmed Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems
title_sort large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of ta diffusion barriers in ultralow-k dielectric systems
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/60630
_version_ 1781781884045361152

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