Large scale ab initio molecular dynamics simulations of hydrogen-induced degradation of Ta diffusion barriers in ultralow-k dielectric systems

• Main Authors: Dai, L., Tan, V.B.C., Yang, S.-W., Wu, P., Chen, X.-T.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/60630
• Institution: National University of Singapore

10.1063/1.2432948