Micromachined III-V multimorph actuators for MOEMS applications - Concept, design, and model

Micromachined III-V multimorph actuators for MOEMS applications - Concept, design, and model

10.1109/JMEMS.2005.844779

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Bibliographic Details
Main Authors: Ongkodjojo, A., Tay, F.E.H., Akkipeddi, R.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
AlAs-GaAs
Global optimization
III-V materials
Microactuator
Microoptoelectromechanical systems (MOEMS)
Multimorph
Piezoelectric effect
Simulated annealing (SA)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60745
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/60745

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