Micromechanical digital-to-analog converter for out-of-plane motion

10.1109/JMEMS.2004.835757

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Bibliographic Details
Main Authors:	Zhou, G., Logeeswaran, V.J., Tay, F.E.H., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60747
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Institution:	National University of Singapore

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Summary:	10.1109/JMEMS.2004.835757

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