Micromechanical digital-to-analog converter for out-of-plane motion
10.1109/JMEMS.2004.835757
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Main Authors: | Zhou, G., Logeeswaran, V.J., Tay, F.E.H., Chau, F.S. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/60747 |
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Institution: | National University of Singapore |
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