Micromechanical digital-to-analog converter for out-of-plane motion

Micromechanical digital-to-analog converter for out-of-plane motion

10.1109/JMEMS.2004.835757

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書目詳細資料
Main Authors:	Zhou, G., Logeeswaran, V.J., Tay, F.E.H., Chau, F.S.
其他作者:	MECHANICAL ENGINEERING
格式:	Article
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/60747
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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