Micromechanical digital-to-analog converter for out-of-plane motion
10.1109/JMEMS.2004.835757
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sg-nus-scholar.10635-607472023-10-30T09:38:19Z Micromechanical digital-to-analog converter for out-of-plane motion Zhou, G. Logeeswaran, V.J. Tay, F.E.H. Chau, F.S. MECHANICAL ENGINEERING 10.1109/JMEMS.2004.835757 Journal of Microelectromechanical Systems 13 5 770-778 JMIYE 2014-06-17T06:26:52Z 2014-06-17T06:26:52Z 2004-10 Article Zhou, G., Logeeswaran, V.J., Tay, F.E.H., Chau, F.S. (2004-10). Micromechanical digital-to-analog converter for out-of-plane motion. Journal of Microelectromechanical Systems 13 (5) : 770-778. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2004.835757 10577157 http://scholarbank.nus.edu.sg/handle/10635/60747 000224413100007 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1109/JMEMS.2004.835757 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Zhou, G. Logeeswaran, V.J. Tay, F.E.H. Chau, F.S. |
| format |
Article |
| author |
Zhou, G. Logeeswaran, V.J. Tay, F.E.H. Chau, F.S. |
| spellingShingle |
Zhou, G. Logeeswaran, V.J. Tay, F.E.H. Chau, F.S. Micromechanical digital-to-analog converter for out-of-plane motion |
| author_sort |
Zhou, G. |
| title |
Micromechanical digital-to-analog converter for out-of-plane motion |
| title_short |
Micromechanical digital-to-analog converter for out-of-plane motion |
| title_full |
Micromechanical digital-to-analog converter for out-of-plane motion |
| title_fullStr |
Micromechanical digital-to-analog converter for out-of-plane motion |
| title_full_unstemmed |
Micromechanical digital-to-analog converter for out-of-plane motion |
| title_sort |
micromechanical digital-to-analog converter for out-of-plane motion |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60747 |
| _version_ |
1781781907089915904 |