Motion characterizations of lateral micromachined sensor based on stroboscopic measurements

10.1109/JSEN.2006.886871

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Bibliographic Details
Main Authors:	Ong, A.K., Tay, F.E.H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	MEMS characterizations Microresonator Planar Motion Analyzer (PMA) Stroboscopic Tunneling sensor
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60830
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60830
record_format	dspace
spelling	sg-nus-scholar.10635-608302023-10-30T10:04:19Z Motion characterizations of lateral micromachined sensor based on stroboscopic measurements Ong, A.K. Tay, F.E.H. MECHANICAL ENGINEERING MEMS characterizations Microresonator Planar Motion Analyzer (PMA) Stroboscopic Tunneling sensor 10.1109/JSEN.2006.886871 IEEE Sensors Journal 7 2 163-170 2014-06-17T06:27:50Z 2014-06-17T06:27:50Z 2007-02 Article Ong, A.K., Tay, F.E.H. (2007-02). Motion characterizations of lateral micromachined sensor based on stroboscopic measurements. IEEE Sensors Journal 7 (2) : 163-170. ScholarBank@NUS Repository. https://doi.org/10.1109/JSEN.2006.886871 1530437X http://scholarbank.nus.edu.sg/handle/10635/60830 000243953600021 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	MEMS characterizations Microresonator Planar Motion Analyzer (PMA) Stroboscopic Tunneling sensor
spellingShingle	MEMS characterizations Microresonator Planar Motion Analyzer (PMA) Stroboscopic Tunneling sensor Ong, A.K. Tay, F.E.H. Motion characterizations of lateral micromachined sensor based on stroboscopic measurements
description	10.1109/JSEN.2006.886871
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Ong, A.K. Tay, F.E.H.
format	Article
author	Ong, A.K. Tay, F.E.H.
author_sort	Ong, A.K.
title	Motion characterizations of lateral micromachined sensor based on stroboscopic measurements
title_short	Motion characterizations of lateral micromachined sensor based on stroboscopic measurements
title_full	Motion characterizations of lateral micromachined sensor based on stroboscopic measurements
title_fullStr	Motion characterizations of lateral micromachined sensor based on stroboscopic measurements
title_full_unstemmed	Motion characterizations of lateral micromachined sensor based on stroboscopic measurements
title_sort	motion characterizations of lateral micromachined sensor based on stroboscopic measurements
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60830
_version_	1781781923275735040

Motion characterizations of lateral micromachined sensor based on stroboscopic measurements

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