Motion characterizations of lateral micromachined sensor based on stroboscopic measurements

Motion characterizations of lateral micromachined sensor based on stroboscopic measurements

10.1109/JSEN.2006.886871

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Bibliographic Details
Main Authors: Ong, A.K., Tay, F.E.H.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
MEMS characterizations
Microresonator
Planar Motion Analyzer (PMA)
Stroboscopic
Tunneling sensor
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60830
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Institution: National University of Singapore
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