Performance improvement in gate level lithography using resolution enhancement techniques

10.1016/j.mee.2004.04.001

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Bibliographic Details
Main Authors:	Chua, G.S., Tay, C.J., Quan, C., Lin, Q.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Assist features Depth of focus Optical proximity correction Resolution enhancement technique Scattering bars
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61070
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61070
record_format	dspace
spelling	sg-nus-scholar.10635-610702023-10-26T07:44:33Z Performance improvement in gate level lithography using resolution enhancement techniques Chua, G.S. Tay, C.J. Quan, C. Lin, Q. MECHANICAL ENGINEERING Assist features Depth of focus Optical proximity correction Resolution enhancement technique Scattering bars 10.1016/j.mee.2004.04.001 Microelectronic Engineering 75 2 155-164 MIENE 2014-06-17T06:30:40Z 2014-06-17T06:30:40Z 2004-08 Article Chua, G.S., Tay, C.J., Quan, C., Lin, Q. (2004-08). Performance improvement in gate level lithography using resolution enhancement techniques. Microelectronic Engineering 75 (2) : 155-164. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2004.04.001 01679317 http://scholarbank.nus.edu.sg/handle/10635/61070 000223442000005 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Assist features Depth of focus Optical proximity correction Resolution enhancement technique Scattering bars
spellingShingle	Assist features Depth of focus Optical proximity correction Resolution enhancement technique Scattering bars Chua, G.S. Tay, C.J. Quan, C. Lin, Q. Performance improvement in gate level lithography using resolution enhancement techniques
description	10.1016/j.mee.2004.04.001
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Chua, G.S. Tay, C.J. Quan, C. Lin, Q.
format	Article
author	Chua, G.S. Tay, C.J. Quan, C. Lin, Q.
author_sort	Chua, G.S.
title	Performance improvement in gate level lithography using resolution enhancement techniques
title_short	Performance improvement in gate level lithography using resolution enhancement techniques
title_full	Performance improvement in gate level lithography using resolution enhancement techniques
title_fullStr	Performance improvement in gate level lithography using resolution enhancement techniques
title_full_unstemmed	Performance improvement in gate level lithography using resolution enhancement techniques
title_sort	performance improvement in gate level lithography using resolution enhancement techniques
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61070
_version_	1781781969959387136

Performance improvement in gate level lithography using resolution enhancement techniques

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