Polygonal pyramidal reflector-based micromachined microscanners for bioimaging

10.1117/1.JMM.13.1.011109

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Bibliographic Details
Main Authors:	Mu, X., Neo, D.W.K., Yu, H., Senthil Kumar, A., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	chevron-beam actuator full circumferential scanning. microelectromechanical systems optical coherence tomography pyramidal polygon microreflector resonating soft lithography two-stage double T-shaped spring system
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61122
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61122
record_format	dspace
spelling	sg-nus-scholar.10635-611222023-10-30T22:00:59Z Polygonal pyramidal reflector-based micromachined microscanners for bioimaging Mu, X. Neo, D.W.K. Yu, H. Senthil Kumar, A. Chau, F.S. MECHANICAL ENGINEERING chevron-beam actuator full circumferential scanning. microelectromechanical systems optical coherence tomography pyramidal polygon microreflector resonating soft lithography two-stage double T-shaped spring system 10.1117/1.JMM.13.1.011109 Journal of Micro/ Nanolithography, MEMS, and MOEMS 13 1 - JMMMG 2014-06-17T06:31:17Z 2014-06-17T06:31:17Z 2014-01 Article Mu, X., Neo, D.W.K., Yu, H., Senthil Kumar, A., Chau, F.S. (2014-01). Polygonal pyramidal reflector-based micromachined microscanners for bioimaging. Journal of Micro/ Nanolithography, MEMS, and MOEMS 13 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/1.JMM.13.1.011109 19325150 http://scholarbank.nus.edu.sg/handle/10635/61122 000338630500018 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	chevron-beam actuator full circumferential scanning. microelectromechanical systems optical coherence tomography pyramidal polygon microreflector resonating soft lithography two-stage double T-shaped spring system
spellingShingle	chevron-beam actuator full circumferential scanning. microelectromechanical systems optical coherence tomography pyramidal polygon microreflector resonating soft lithography two-stage double T-shaped spring system Mu, X. Neo, D.W.K. Yu, H. Senthil Kumar, A. Chau, F.S. Polygonal pyramidal reflector-based micromachined microscanners for bioimaging
description	10.1117/1.JMM.13.1.011109
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Mu, X. Neo, D.W.K. Yu, H. Senthil Kumar, A. Chau, F.S.
format	Article
author	Mu, X. Neo, D.W.K. Yu, H. Senthil Kumar, A. Chau, F.S.
author_sort	Mu, X.
title	Polygonal pyramidal reflector-based micromachined microscanners for bioimaging
title_short	Polygonal pyramidal reflector-based micromachined microscanners for bioimaging
title_full	Polygonal pyramidal reflector-based micromachined microscanners for bioimaging
title_fullStr	Polygonal pyramidal reflector-based micromachined microscanners for bioimaging
title_full_unstemmed	Polygonal pyramidal reflector-based micromachined microscanners for bioimaging
title_sort	polygonal pyramidal reflector-based micromachined microscanners for bioimaging
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61122
_version_	1781781984455950336

Polygonal pyramidal reflector-based micromachined microscanners for bioimaging

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