Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates

Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates

10.1016/j.tsf.2010.09.042

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Bibliographic Details
Main Authors: Oh, S.R., Yao, K., Chow, C.L., Tay, F.E.H.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Piezoelectric
Polymer
PVDF
Residual stress
Thin film
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61228
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Institution: National University of Singapore
Description
Summary:10.1016/j.tsf.2010.09.042

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