Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates

10.1016/j.tsf.2010.09.042

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Bibliographic Details
Main Authors:	Oh, S.R., Yao, K., Chow, C.L., Tay, F.E.H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Piezoelectric Polymer PVDF Residual stress Thin film
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61228
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61228
record_format	dspace
spelling	sg-nus-scholar.10635-612282023-10-30T21:59:27Z Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates Oh, S.R. Yao, K. Chow, C.L. Tay, F.E.H. MECHANICAL ENGINEERING Piezoelectric Polymer PVDF Residual stress Thin film 10.1016/j.tsf.2010.09.042 Thin Solid Films 519 4 1441-1444 THSFA 2014-06-17T06:32:34Z 2014-06-17T06:32:34Z 2010-12-01 Article Oh, S.R., Yao, K., Chow, C.L., Tay, F.E.H. (2010-12-01). Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates. Thin Solid Films 519 (4) : 1441-1444. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2010.09.042 00406090 http://scholarbank.nus.edu.sg/handle/10635/61228 000285125300030 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Piezoelectric Polymer PVDF Residual stress Thin film
spellingShingle	Piezoelectric Polymer PVDF Residual stress Thin film Oh, S.R. Yao, K. Chow, C.L. Tay, F.E.H. Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates
description	10.1016/j.tsf.2010.09.042
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Oh, S.R. Yao, K. Chow, C.L. Tay, F.E.H.
format	Article
author	Oh, S.R. Yao, K. Chow, C.L. Tay, F.E.H.
author_sort	Oh, S.R.
title	Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates
title_short	Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates
title_full	Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates
title_fullStr	Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates
title_full_unstemmed	Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates
title_sort	residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61228
_version_	1781782007033888768

Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates

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