Residual stress in piezoelectric poly(vinylidene-fluoride-co- trifluoroethylene) thin films deposited on silicon substrates
10.1016/j.tsf.2010.09.042
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Main Authors: | Oh, S.R., Yao, K., Chow, C.L., Tay, F.E.H. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/61228 |
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Institution: | National University of Singapore |
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