Surface roughness investigation of semi-conductor wafers

10.1016/j.optlastec.2003.12.010

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Bibliographic Details
Main Authors:	Tay, C.J., Wang, S.H., Quan, C., Ng, B.L., Chan, K.C.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Atomic force microscope (AFM) Light scattering Non-contact measurement Surface roughness Total integrated scattering (TIS)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61440
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61440
record_format	dspace
spelling	sg-nus-scholar.10635-614402023-10-26T08:39:25Z Surface roughness investigation of semi-conductor wafers Tay, C.J. Wang, S.H. Quan, C. Ng, B.L. Chan, K.C. MECHANICAL ENGINEERING Atomic force microscope (AFM) Light scattering Non-contact measurement Surface roughness Total integrated scattering (TIS) 10.1016/j.optlastec.2003.12.010 Optics and Laser Technology 36 7 535-539 OLTCA 2014-06-17T06:35:09Z 2014-06-17T06:35:09Z 2004-10 Article Tay, C.J., Wang, S.H., Quan, C., Ng, B.L., Chan, K.C. (2004-10). Surface roughness investigation of semi-conductor wafers. Optics and Laser Technology 36 (7) : 535-539. ScholarBank@NUS Repository. https://doi.org/10.1016/j.optlastec.2003.12.010 00303992 http://scholarbank.nus.edu.sg/handle/10635/61440 000223584700004 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Atomic force microscope (AFM) Light scattering Non-contact measurement Surface roughness Total integrated scattering (TIS)
spellingShingle	Atomic force microscope (AFM) Light scattering Non-contact measurement Surface roughness Total integrated scattering (TIS) Tay, C.J. Wang, S.H. Quan, C. Ng, B.L. Chan, K.C. Surface roughness investigation of semi-conductor wafers
description	10.1016/j.optlastec.2003.12.010
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tay, C.J. Wang, S.H. Quan, C. Ng, B.L. Chan, K.C.
format	Article
author	Tay, C.J. Wang, S.H. Quan, C. Ng, B.L. Chan, K.C.
author_sort	Tay, C.J.
title	Surface roughness investigation of semi-conductor wafers
title_short	Surface roughness investigation of semi-conductor wafers
title_full	Surface roughness investigation of semi-conductor wafers
title_fullStr	Surface roughness investigation of semi-conductor wafers
title_full_unstemmed	Surface roughness investigation of semi-conductor wafers
title_sort	surface roughness investigation of semi-conductor wafers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61440
_version_	1781782051800743936

Surface roughness investigation of semi-conductor wafers

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