Vibration measurement of a micro-structure by digital holographic microscopy

Vibration measurement of a micro-structure by digital holographic microscopy

10.1088/0957-0233/20/6/065301

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Bibliographic Details
Main Authors: Shi, H., Fu, Y., Quan, C., Tay, C.J., He, X.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Digital holography
MEMS characterization
Temporal analysis
Vibration measurement
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61671
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Institution: National University of Singapore
Description
Summary:10.1088/0957-0233/20/6/065301

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