Vibration measurement of a micro-structure by digital holographic microscopy

10.1088/0957-0233/20/6/065301

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Bibliographic Details
Main Authors:	Shi, H., Fu, Y., Quan, C., Tay, C.J., He, X.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Digital holography MEMS characterization Temporal analysis Vibration measurement
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61671
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61671
record_format	dspace
spelling	sg-nus-scholar.10635-616712024-11-13T04:24:10Z Vibration measurement of a micro-structure by digital holographic microscopy Shi, H. Fu, Y. Quan, C. Tay, C.J. He, X. MECHANICAL ENGINEERING Digital holography MEMS characterization Temporal analysis Vibration measurement 10.1088/0957-0233/20/6/065301 Measurement Science and Technology 20 6 - MSTCE 2014-06-17T06:37:57Z 2014-06-17T06:37:57Z 2009 Article Shi, H., Fu, Y., Quan, C., Tay, C.J., He, X. (2009). Vibration measurement of a micro-structure by digital holographic microscopy. Measurement Science and Technology 20 (6) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/20/6/065301 09570233 http://scholarbank.nus.edu.sg/handle/10635/61671 000267293800014 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Digital holography MEMS characterization Temporal analysis Vibration measurement
spellingShingle	Digital holography MEMS characterization Temporal analysis Vibration measurement Shi, H. Fu, Y. Quan, C. Tay, C.J. He, X. Vibration measurement of a micro-structure by digital holographic microscopy
description	10.1088/0957-0233/20/6/065301
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Shi, H. Fu, Y. Quan, C. Tay, C.J. He, X.
format	Article
author	Shi, H. Fu, Y. Quan, C. Tay, C.J. He, X.
author_sort	Shi, H.
title	Vibration measurement of a micro-structure by digital holographic microscopy
title_short	Vibration measurement of a micro-structure by digital holographic microscopy
title_full	Vibration measurement of a micro-structure by digital holographic microscopy
title_fullStr	Vibration measurement of a micro-structure by digital holographic microscopy
title_full_unstemmed	Vibration measurement of a micro-structure by digital holographic microscopy
title_sort	vibration measurement of a micro-structure by digital holographic microscopy
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61671
_version_	1821197716324089856

Vibration measurement of a micro-structure by digital holographic microscopy

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