Vibration measurement of a micro-structure by digital holographic microscopy

10.1088/0957-0233/20/6/065301

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Bibliographic Details
Main Authors:	Shi, H., Fu, Y., Quan, C., Tay, C.J., He, X.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Digital holography MEMS characterization Temporal analysis Vibration measurement
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61671
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Institution:	National University of Singapore

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