Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces

Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces

Applied Surface Science

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Bibliographic Details
Main Authors: Lu, Y.F., Lee, Y.P., Hong, M.H., Low, T.S.
Other Authors: DATA STORAGE INSTITUTE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61738
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Institution: National University of Singapore
Description
Summary:Applied Surface Science

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