Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
Applied Surface Science
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2014
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sg-nus-scholar.10635-617382015-01-27T05:55:59Z Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces Lu, Y.F. Lee, Y.P. Hong, M.H. Low, T.S. DATA STORAGE INSTITUTE ELECTRICAL ENGINEERING Applied Surface Science 119 1-2 137-146 ASUSE 2014-06-17T06:43:26Z 2014-06-17T06:43:26Z 1997-09 Article Lu, Y.F.,Lee, Y.P.,Hong, M.H.,Low, T.S. (1997-09). Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces. Applied Surface Science 119 (1-2) : 137-146. ScholarBank@NUS Repository. 01694332 http://scholarbank.nus.edu.sg/handle/10635/61738 NOT_IN_WOS Scopus |
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National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Applied Surface Science |
| author2 |
DATA STORAGE INSTITUTE |
| author_facet |
DATA STORAGE INSTITUTE Lu, Y.F. Lee, Y.P. Hong, M.H. Low, T.S. |
| format |
Article |
| author |
Lu, Y.F. Lee, Y.P. Hong, M.H. Low, T.S. |
| spellingShingle |
Lu, Y.F. Lee, Y.P. Hong, M.H. Low, T.S. Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces |
| author_sort |
Lu, Y.F. |
| title |
Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces |
| title_short |
Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces |
| title_full |
Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces |
| title_fullStr |
Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces |
| title_full_unstemmed |
Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces |
| title_sort |
acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/61738 |
| _version_ |
1681085648242475008 |