Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces

Applied Surface Science

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Bibliographic Details
Main Authors: Lu, Y.F., Lee, Y.P., Hong, M.H., Low, T.S.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61738
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-617382024-11-14T00:41:50Z Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces Lu, Y.F. Lee, Y.P. Hong, M.H. Low, T.S. ELECTRICAL ENGINEERING DATA STORAGE INSTITUTE Applied Surface Science 119 1-2 137-146 ASUSE 2014-06-17T06:43:26Z 2014-06-17T06:43:26Z 1997-09 Article Lu, Y.F.,Lee, Y.P.,Hong, M.H.,Low, T.S. (1997-09). Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces. Applied Surface Science 119 (1-2) : 137-146. ScholarBank@NUS Repository. 01694332 http://scholarbank.nus.edu.sg/handle/10635/61738 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description Applied Surface Science
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Lu, Y.F.
Lee, Y.P.
Hong, M.H.
Low, T.S.
format Article
author Lu, Y.F.
Lee, Y.P.
Hong, M.H.
Low, T.S.
spellingShingle Lu, Y.F.
Lee, Y.P.
Hong, M.H.
Low, T.S.
Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
author_sort Lu, Y.F.
title Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
title_short Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
title_full Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
title_fullStr Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
title_full_unstemmed Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
title_sort acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/61738
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