Acoustic wave monitoring of cleaning and ablation during excimer laser interaction with copper surfaces
Applied Surface Science
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Main Authors: | Lu, Y.F., Lee, Y.P., Hong, M.H., Low, T.S. |
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Other Authors: | DATA STORAGE INSTITUTE |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/61738 |
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Institution: | National University of Singapore |
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