Audible acoustic wave real-time monitoring in laser processing of microelectronic materials

Audible acoustic wave real-time monitoring in laser processing of microelectronic materials

10.1117/12.280568

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Bibliographic Details
Main Authors: Hong, M.H., Lu, Y.F., Song, W.D., Liu, D.M., Low, T.S.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Audible acoustic wave
Laser ablation
Laser materials interaction
Real-time monitoring
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81381
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/81381

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