Audible acoustic wave real-time monitoring in laser processing of microelectronic materials

10.1117/12.280568

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Bibliographic Details
Main Authors:	Hong, M.H., Lu, Y.F., Song, W.D., Liu, D.M., Low, T.S.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Audible acoustic wave Laser ablation Laser materials interaction Real-time monitoring
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81381
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81381
record_format	dspace
spelling	sg-nus-scholar.10635-813812023-10-29T23:07:20Z Audible acoustic wave real-time monitoring in laser processing of microelectronic materials Hong, M.H. Lu, Y.F. Song, W.D. Liu, D.M. Low, T.S. ELECTRICAL ENGINEERING Audible acoustic wave Laser ablation Laser materials interaction Real-time monitoring 10.1117/12.280568 Proceedings of SPIE - The International Society for Optical Engineering 3184 148-157 PSISD 2014-10-07T03:07:42Z 2014-10-07T03:07:42Z 1997 Conference Paper Hong, M.H., Lu, Y.F., Song, W.D., Liu, D.M., Low, T.S. (1997). Audible acoustic wave real-time monitoring in laser processing of microelectronic materials. Proceedings of SPIE - The International Society for Optical Engineering 3184 : 148-157. ScholarBank@NUS Repository. https://doi.org/10.1117/12.280568 0277786X http://scholarbank.nus.edu.sg/handle/10635/81381 A1997BJ51B00019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Audible acoustic wave Laser ablation Laser materials interaction Real-time monitoring
spellingShingle	Audible acoustic wave Laser ablation Laser materials interaction Real-time monitoring Hong, M.H. Lu, Y.F. Song, W.D. Liu, D.M. Low, T.S. Audible acoustic wave real-time monitoring in laser processing of microelectronic materials
description	10.1117/12.280568
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Hong, M.H. Lu, Y.F. Song, W.D. Liu, D.M. Low, T.S.
format	Conference or Workshop Item
author	Hong, M.H. Lu, Y.F. Song, W.D. Liu, D.M. Low, T.S.
author_sort	Hong, M.H.
title	Audible acoustic wave real-time monitoring in laser processing of microelectronic materials
title_short	Audible acoustic wave real-time monitoring in laser processing of microelectronic materials
title_full	Audible acoustic wave real-time monitoring in laser processing of microelectronic materials
title_fullStr	Audible acoustic wave real-time monitoring in laser processing of microelectronic materials
title_full_unstemmed	Audible acoustic wave real-time monitoring in laser processing of microelectronic materials
title_sort	audible acoustic wave real-time monitoring in laser processing of microelectronic materials
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81381
_version_	1781783985563631616

Audible acoustic wave real-time monitoring in laser processing of microelectronic materials

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