Capacitance-voltage measurements on MOS capacitors fabricated on polycrystalline silicon wafers

Applied Surface Science

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Bibliographic Details
Main Authors:	Ling, C.H., Tay, T.M.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61916
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61916
record_format	dspace
spelling	sg-nus-scholar.10635-619162015-03-03T22:05:21Z Capacitance-voltage measurements on MOS capacitors fabricated on polycrystalline silicon wafers Ling, C.H. Tay, T.M. ELECTRICAL ENGINEERING Applied Surface Science 59 2 105-110 ASUSE 2014-06-17T06:45:25Z 2014-06-17T06:45:25Z 1992 Article Ling, C.H.,Tay, T.M. (1992). Capacitance-voltage measurements on MOS capacitors fabricated on polycrystalline silicon wafers. Applied Surface Science 59 (2) : 105-110. ScholarBank@NUS Repository. 01694332 http://scholarbank.nus.edu.sg/handle/10635/61916 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Applied Surface Science
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Ling, C.H. Tay, T.M.
format	Article
author	Ling, C.H. Tay, T.M.
spellingShingle	Ling, C.H. Tay, T.M. Capacitance-voltage measurements on MOS capacitors fabricated on polycrystalline silicon wafers
author_sort	Ling, C.H.
title	Capacitance-voltage measurements on MOS capacitors fabricated on polycrystalline silicon wafers
title_short	Capacitance-voltage measurements on MOS capacitors fabricated on polycrystalline silicon wafers
title_full	Capacitance-voltage measurements on MOS capacitors fabricated on polycrystalline silicon wafers
title_fullStr	Capacitance-voltage measurements on MOS capacitors fabricated on polycrystalline silicon wafers
title_full_unstemmed	Capacitance-voltage measurements on MOS capacitors fabricated on polycrystalline silicon wafers
title_sort	capacitance-voltage measurements on mos capacitors fabricated on polycrystalline silicon wafers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61916
_version_	1681085680437952512

Capacitance-voltage measurements on MOS capacitors fabricated on polycrystalline silicon wafers

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