Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem

10.1016/0038-1101(90)90192-H

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Main Authors:	Choo, S.C., Leong, M.S., Liem, C.B.T., Kong, K.C.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62175
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62175
record_format	dspace
spelling	sg-nus-scholar.10635-621752024-11-09T11:59:35Z Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem Choo, S.C. Leong, M.S. Liem, C.B.T. Kong, K.C. ELECTRICAL ENGINEERING 10.1016/0038-1101(90)90192-H Solid-State Electronics 33 6 783-791 SSELA 2014-06-17T06:48:12Z 2014-06-17T06:48:12Z 1990 Article Choo, S.C., Leong, M.S., Liem, C.B.T., Kong, K.C. (1990). Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem. Solid-State Electronics 33 (6) : 783-791. ScholarBank@NUS Repository. https://doi.org/10.1016/0038-1101(90)90192-H 00381101 http://scholarbank.nus.edu.sg/handle/10635/62175 A1990DP25500021 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1016/0038-1101(90)90192-H
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Choo, S.C. Leong, M.S. Liem, C.B.T. Kong, K.C.
format	Article
author	Choo, S.C. Leong, M.S. Liem, C.B.T. Kong, K.C.
spellingShingle	Choo, S.C. Leong, M.S. Liem, C.B.T. Kong, K.C. Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem
author_sort	Choo, S.C.
title	Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem
title_short	Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem
title_full	Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem
title_fullStr	Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem
title_full_unstemmed	Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem
title_sort	extraction of semiconductor dopant profiles from spreading resistance data: an inverse problem
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62175
_version_	1821197919105056768

Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problem

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