Improving the speed of scanning electron microscope deflection systems

Improving the speed of scanning electron microscope deflection systems

10.1088/0957-0233/10/11/316

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Bibliographic Details
Main Authors: Lee, K.W., Thong, J.T.L.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Electromagnetic deflection
Scanning electron microscope
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62326
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Institution: National University of Singapore
Description
Summary:10.1088/0957-0233/10/11/316

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