Improving the speed of scanning electron microscope deflection systems

10.1088/0957-0233/10/11/316

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Bibliographic Details
Main Authors:	Lee, K.W., Thong, J.T.L.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Electromagnetic deflection Scanning electron microscope
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62326
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62326
record_format	dspace
spelling	sg-nus-scholar.10635-623262023-09-21T20:52:10Z Improving the speed of scanning electron microscope deflection systems Lee, K.W. Thong, J.T.L. ELECTRICAL ENGINEERING Electromagnetic deflection Scanning electron microscope 10.1088/0957-0233/10/11/316 Measurement Science and Technology 10 11 1070-1074 MSTCE 2014-06-17T06:49:50Z 2014-06-17T06:49:50Z 1999-11 Article Lee, K.W., Thong, J.T.L. (1999-11). Improving the speed of scanning electron microscope deflection systems. Measurement Science and Technology 10 (11) : 1070-1074. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/10/11/316 09570233 http://scholarbank.nus.edu.sg/handle/10635/62326 000083648300017 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electromagnetic deflection Scanning electron microscope
spellingShingle	Electromagnetic deflection Scanning electron microscope Lee, K.W. Thong, J.T.L. Improving the speed of scanning electron microscope deflection systems
description	10.1088/0957-0233/10/11/316
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lee, K.W. Thong, J.T.L.
format	Article
author	Lee, K.W. Thong, J.T.L.
author_sort	Lee, K.W.
title	Improving the speed of scanning electron microscope deflection systems
title_short	Improving the speed of scanning electron microscope deflection systems
title_full	Improving the speed of scanning electron microscope deflection systems
title_fullStr	Improving the speed of scanning electron microscope deflection systems
title_full_unstemmed	Improving the speed of scanning electron microscope deflection systems
title_sort	improving the speed of scanning electron microscope deflection systems
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62326
_version_	1779169451587928064

Improving the speed of scanning electron microscope deflection systems

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