Ion-assisted pulsed laser deposition of aluminum nitride thin films

Journal of Applied Physics

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Bibliographic Details
Main Authors:	Lu, Y.F., Ren, Z.M., Chong, T.C., Cheong, B.A., Chow, S.K., Wang, J.P.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62358
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62358
record_format	dspace
spelling	sg-nus-scholar.10635-623582024-11-10T16:37:05Z Ion-assisted pulsed laser deposition of aluminum nitride thin films Lu, Y.F. Ren, Z.M. Chong, T.C. Cheong, B.A. Chow, S.K. Wang, J.P. ELECTRICAL ENGINEERING Journal of Applied Physics 87 3 1540-1542 JAPIA 2014-06-17T06:50:11Z 2014-06-17T06:50:11Z 2000-02 Article Lu, Y.F.,Ren, Z.M.,Chong, T.C.,Cheong, B.A.,Chow, S.K.,Wang, J.P. (2000-02). Ion-assisted pulsed laser deposition of aluminum nitride thin films. Journal of Applied Physics 87 (3) : 1540-1542. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/62358 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Journal of Applied Physics
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lu, Y.F. Ren, Z.M. Chong, T.C. Cheong, B.A. Chow, S.K. Wang, J.P.
format	Article
author	Lu, Y.F. Ren, Z.M. Chong, T.C. Cheong, B.A. Chow, S.K. Wang, J.P.
spellingShingle	Lu, Y.F. Ren, Z.M. Chong, T.C. Cheong, B.A. Chow, S.K. Wang, J.P. Ion-assisted pulsed laser deposition of aluminum nitride thin films
author_sort	Lu, Y.F.
title	Ion-assisted pulsed laser deposition of aluminum nitride thin films
title_short	Ion-assisted pulsed laser deposition of aluminum nitride thin films
title_full	Ion-assisted pulsed laser deposition of aluminum nitride thin films
title_fullStr	Ion-assisted pulsed laser deposition of aluminum nitride thin films
title_full_unstemmed	Ion-assisted pulsed laser deposition of aluminum nitride thin films
title_sort	ion-assisted pulsed laser deposition of aluminum nitride thin films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62358
_version_	1821225121806811136

Ion-assisted pulsed laser deposition of aluminum nitride thin films

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