Ion-assisted pulsed laser deposition of aluminum nitride thin films

Ion-assisted pulsed laser deposition of aluminum nitride thin films

Journal of Applied Physics

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Bibliographic Details
Main Authors:	Lu, Y.F., Ren, Z.M., Chong, T.C., Cheong, B.A., Chow, S.K., Wang, J.P.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62358
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Institution:	National University of Singapore

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