Isolation process induced wafer warpage

Electrochemical and Solid-State Letters

Saved in:

Bibliographic Details
Main Authors:	Jang, S.-A., Yeo, I.-S., Kim, Y.-B., Cho, B.-J., Lee, S.-K.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62360
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

Description
Summary:	Electrochemical and Solid-State Letters

Similar Items