Isolation process induced wafer warpage

Electrochemical and Solid-State Letters

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Main Authors: Jang, S.-A., Yeo, I.-S., Kim, Y.-B., Cho, B.-J., Lee, S.-K.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62360
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-623602015-03-27T08:14:33Z Isolation process induced wafer warpage Jang, S.-A. Yeo, I.-S. Kim, Y.-B. Cho, B.-J. Lee, S.-K. ELECTRICAL ENGINEERING Electrochemical and Solid-State Letters 1 1 46-48 ESLEF 2014-06-17T06:50:12Z 2014-06-17T06:50:12Z 1998-07 Article Jang, S.-A.,Yeo, I.-S.,Kim, Y.-B.,Cho, B.-J.,Lee, S.-K. (1998-07). Isolation process induced wafer warpage. Electrochemical and Solid-State Letters 1 (1) : 46-48. ScholarBank@NUS Repository. 10990062 http://scholarbank.nus.edu.sg/handle/10635/62360 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Electrochemical and Solid-State Letters
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Jang, S.-A.
Yeo, I.-S.
Kim, Y.-B.
Cho, B.-J.
Lee, S.-K.
format Article
author Jang, S.-A.
Yeo, I.-S.
Kim, Y.-B.
Cho, B.-J.
Lee, S.-K.
spellingShingle Jang, S.-A.
Yeo, I.-S.
Kim, Y.-B.
Cho, B.-J.
Lee, S.-K.
Isolation process induced wafer warpage
author_sort Jang, S.-A.
title Isolation process induced wafer warpage
title_short Isolation process induced wafer warpage
title_full Isolation process induced wafer warpage
title_fullStr Isolation process induced wafer warpage
title_full_unstemmed Isolation process induced wafer warpage
title_sort isolation process induced wafer warpage
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/62360
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